Care Area Wizard Outputs

After the user is done defining selection sets he will want to produce output that can be sent to KLA-Tencor’s inspection equipment. All of the output generated by CA Wizard is placed into a single output directory which makes it easy to transfer to another application. The following outputs are generated as a group:

CAF - Care Area File. Rectangles defining all of the care area regions organized by layer/datatype and by cell.

CONFIG.CSV - an ascii file containing information about the two registration sites.

MARK1.TIF, MARK2.TIF - TIF images of the registration sites. These are monochrome images (user control black on white or white on black

MAPPING.CSV - a mapping file which maps layer/datatype to selection set.

The CONFIG.CSV File

The configuration file is always called config.csv and is a comma delimted ASCII file. It contains information about the two images clips of the registration marks in the following syntax:

Clip1,mark1.gif

Clip2,mark2.gif

orientation,UP | DOWN | LEFT | RIGHT

DataType-RegistrationSite1,255

LayerId=RegistrationSite1,255

DataType-RegistrationSite2,254

LayerId=RegistrationSite2,254

The data type and layer assignments for registsration sites 1 and 2 are set in the CA Wizard Preferences.

The MAPPING.CSV File

The mapping file is called mapping .csv and it is a comma delimited ASCII file. It contains information in the following syntax:

DataType,LayerId,grouptype,Regionid,groupname,GroupCode,GroupOverlapPriority

0, 1, CA, R4, SRAM1, 1, 42

0, 4, DCA, R2, DUMMY, 10, 43

Layer ID - this is the layer number for the selection set

Data Type - this is the datatype for the selection set

Group Type - CA = Care Area, DCA = Don;t Care Area

Region ID - don’t know what this is

Group Name - assume this is the selection set name

Group Code - don’t know where this comes from or what it means

Group Overlap Priority - a positive interger (must be unique) indicating the overlap priority of this layer.

The CA File

The CA File (.caf) contains the Selection Sets (also known as Groups). Each group consists of one or more rectangles. All rectangles for a given group are stored on a common layer and datatype and contained within a single cell. The cell’s name is the Group Name.

There are two “special” cells in the file to hold the registration information: regsite1 and regsite2. These each contain a single rectangle defining the extents of the registration polygon. The layer/datatype used for the two registration sites should coincide with layers/datatypes used for care areas.

The name of the top level cell in the care area file is user defined.




	Care Area Wizard Outputs After the user is done defining selection sets he will want to produce output that can be sent to KLA-Tencor’s inspection equipment. All of the output generated by CA Wizard is placed into a single output directory which makes it easy to transfer to another application. The following outputs are generated as a group: CAF - Care Area File. Rectangles defining all of the care area regions organized by layer/datatype and by cell. CONFIG.CSV - an ascii file containing information about the two registration sites. MARK1.TIF, MARK2.TIF - TIF images of the registration sites. These are monochrome images (user control black on white or white on black MAPPING.CSV - a mapping file which maps layer/datatype to selection set.

	The CONFIG.CSV File The configuration file is always called config.csv and is a comma delimted ASCII file. It contains information about the two images clips of the registration marks in the following syntax: Clip1,mark1.gif Clip2,mark2.gif orientation,UP \| DOWN \| LEFT \| RIGHT DataType-RegistrationSite1,255 LayerId=RegistrationSite1,255 DataType-RegistrationSite2,254 LayerId=RegistrationSite2,254
	The data type and layer assignments for registsration sites 1 and 2 are set in the CA Wizard Preferences.

	The MAPPING.CSV File The mapping file is called mapping .csv and it is a comma delimited ASCII file. It contains information in the following syntax: DataType,LayerId,grouptype,Regionid,groupname,GroupCode,GroupOverlapPriority 0, 1, CA, R4, SRAM1, 1, 42 0, 4, DCA, R2, DUMMY, 10, 43

	Layer ID - this is the layer number for the selection set Data Type - this is the datatype for the selection set Group Type - CA = Care Area, DCA = Don;t Care Area Region ID - don’t know what this is Group Name - assume this is the selection set name Group Code - don’t know where this comes from or what it means Group Overlap Priority - a positive interger (must be unique) indicating the overlap priority of this layer.

	The CA File

	The CA File (.caf) contains the Selection Sets (also known as Groups). Each group consists of one or more rectangles. All rectangles for a given group are stored on a common layer and datatype and contained within a single cell. The cell’s name is the Group Name.



	There are two “special” cells in the file to hold the registration information: regsite1 and regsite2. These each contain a single rectangle defining the extents of the registration polygon. The layer/datatype used for the two registration sites should coincide with layers/datatypes used for care areas. The name of the top level cell in the care area file is user defined.