G81/G85 Wafer Map Description

(based on Micron TN0021.PDF)


The following notes apply to the sample file at the bottom of this page:

Attribute Notes
SubstrateId Identifying scribe on the physical wafer
SubstrateType The type of substrate = "Wafer"
Rows The number of rows on the map
Columns The number of columns in the map
LotId Production lot identifier for this map data
BinType The format in which the bin code for each device will be represented in the map. The example below uses a single ASCII character.
MapType Method used to structure the bin data. The example below uses a one dimensional array for each row.
NullBin Bin value indicating no device or an untested device
ProductId Product identifier
WaferSize Diameter of wafer in millimeters
CreateDate Date and time when the map data is acquired, formatted as YYYYMMDDhhmmssmmm (year-month-date-hour-minute-second-millisecond)
DeviceSizeX Device size on x-axis in microns
DeviceSizeY Device size on y-axis in microns
Orientation Orientation of wafer flat or notch in relation to the map data. "0" = the flat or notch is at the bottom of map data
SupplierName Name of the wafer supplier.
OriginLocation Location of the origin of the coordinates 2=upper left
ReferenceDeviceX X coordinate (array position) of the reference device to align device matrix on the wafer with the map data
ReferenceDeviceY Y coordinate (array position) of the reference device to align device matrix on the wafer with the map data
BinCode BinCode Bin category in map. In this example:
BinCode “G” for each good probed die in map
BinCode “X” for each failed die in map
BinCode “0” for each Null Bin in the map
BinCount The number of devices on the wafer with the specified BinCode
BinQuality Describes the quality (pass or fail) of the specified BinCode




Sample File

<?xml version='1.0' encoding='utf 8'?>
  <Maps>

   <Map 
      xmlns="http://www.semi.org" 
      SubstrateId="123456705F2" 
      SubstrateType="Wafer" 
      FormatRevision="SEMI G85 0703"
   >

   <Device 
      Rows="35" 
      LotId="0050000" 
      BinType="ASCII" 
      Columns="40" 
      MapType="Array"
      NullBin="0" 
      ProductId="DEVICE01" 
      WaferSize="200" 
      CreateDate="20050117093925000" 
      DeviceSizeX="4800.60"
      DeviceSizeY="5484.12" 
      Orientation="0" 
      SupplierName="XYZ Corp." 
      OriginLocation="2"
   >

   <ReferenceDevice 
      ReferenceDeviceX="27" 
      ReferenceDeviceY="34"
   />

   <Bin 
      BinCode="G" 
      BinCount="830" 
      BinQuality="Pass"
   />

   <Bin 
      BinCode="X" 
      BinCount="255" 
      BinQuality="Fail"
   />

   <Data>
    <Row><![CDATA[00000000000000XXXXGXXGGGXX00000000000000]]></Row>
    <Row><![CDATA[000000000000XXXGGXXGXGGXGGGX000000000000]]></Row>
    <Row><![CDATA[0000000000XGXGGGGGGGGXXXGGGGGX0000000000]]></Row>
    <Row><![CDATA[00000000GGGGGXGGGGGXGXGGGGGXGGXX00000000]]></Row>
    <Row><![CDATA[000000XGXGGGGGGGGGGGGGGGGGGGGGGGG0000000]]></Row>
    <Row><![CDATA[00000XXXGXXXGGGGGGGGXXGGGXGGGGGGGGX00000]]></Row>
    <Row><![CDATA[0000XXGGGGGGGGGGGGGGGGGGGGGGGGGGGGX00000]]></Row>
    <Row><![CDATA[0000GGGGGXGGGGGGGGGGGGGGXGGGXGGGGGGX0000]]></Row>
    <Row><![CDATA[000GGGGGGGGGGGGGGGGGGGGGGXGGGGGXGGXGX000]]></Row>
    <Row><![CDATA[00XXGGGGXGGXGGGGGGGXGGGGGXXGGGGGGXXGGX00]]></Row>
    <Row><![CDATA[00GGGGGGXGXGGGGGGGGGGGGGGGGXXGGXGGGGGG00]]></Row>
    <Row><![CDATA[0XGGGGXGGXGGXGGGGGGGGGGGGGGGGGGGGGGGGGX0]]></Row>
    <Row><![CDATA[0GGGXXGGGXXXGGGGGGGGGGGGGGXGGXGGGXXGGGX0]]></Row>
    <Row><![CDATA[0XGGGGGGGGGXGGGGGGGGGXGGGGXXGGGGGGGGGGG0]]></Row>
    <Row><![CDATA[XGGGGGGGGGGXGGGXGGXGGGGGXGXXGGGGGGGGXGGX]]></Row>
    <Row><![CDATA[XGGGGGGGXGXXGGGGGGGGGGGGGGXGGXGGGXGGXGGX]]></Row>
    <Row><![CDATA[XGGGGGGXXGGXGGGGGGGXXGGGXGGXGXXGGXGXXGGX]]></Row>
    <Row><![CDATA[XGXGGGGGXGXXXXGGGGGXXGGGXXXXXXXGXGGGGGGX]]></Row>
    <Row><![CDATA[XGGGXGGGGGXGGGGGGGGGXGGGXXGGGXXGGGGGGGGX]]></Row>
    <Row><![CDATA[XGXGXGGGGGGXGGGXGGGGGGXGGGGGXXGGGGGGGGGX]]></Row>
    <Row><![CDATA[XGGGGGGGXXGGGGGGXGGXGGGXGGGGXGGGGGGGGXGX]]></Row>
    <Row><![CDATA[0GXGGGGGGGGGGGGGXGGGGGGGGGGGGGGXGGGGGGG0]]></Row>
    <Row><![CDATA[0GXGGGGGGGGGGGGGGGGGGXGGGGGGXXGXGXGGGGX0]]></Row>
    <Row><![CDATA[0XXGGGGGGGGGGGXGGGGGGGGGGGGGGGXXGGGXGG00]]></Row>
    <Row><![CDATA[00GGGGGGGGGGGGGGGGGGGGXGGGXGGGXGGGGGGX00]]></Row>
    <Row><![CDATA[000GGGGGGGGGGGGGGGXGGGGGGXGGGGXGXGGGG000]]></Row>
    <Row><![CDATA[000XGGGGXGGGGGGGGGGGGXGGGGGGGGGXGGGGX000]]></Row>
    <Row><![CDATA[00000XGGGGGGGGGGGGGGXXGGGGGGXXXGGGXX0000]]></Row>
    <Row><![CDATA[00000XGGGGGGXXGGGGGGGGGGGXGXGGGXXGX00000]]></Row>
    <Row><![CDATA[000000GGGXGGGGGGGGGGXXGGGGGXXGGXXX000000]]></Row>
    <Row><![CDATA[0000000XXGGGGGGGGGGGXGGXGGXXXGXGX0000000]]></Row>
    <Row><![CDATA[000000000GGGGXXGXGGGGGGGGGXGGXX000000000]]></Row>
    <Row><![CDATA[00000000000XXXGGGGGGGGXXGGXGXX0000000000]]></Row>
    <Row><![CDATA[0000000000000XXGGGXXXXGXXXX0000000000000]]></Row>
    <Row><![CDATA[0000000000000000XXXXXXX00000000000000000]]></Row>
   </Data>
</Device>
</Map>
</Maps>