The Royce MP-300 die mounter reads a format known as Royce XML. This appears to be based on SEMI-E142 but with some variations unique to Royce. We'll discuss here some of the differences between a generic SEMI E-142 map file and the Royce XML file.
< >ROYCE
<RoyceSubstrateMap
xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance"
xmlns:xsd="http://www.w3.org/2001/XMLSchema"
xmlns="http://RoyceInstruments.com/Engineering/SubstrateMaps/RoyceSubstrateMap_201207.xsd"
>
GENERIC E142
<MapData
xmlns="urn:semi-org:xsd.E142-1.V1005.SubstrateMap"
>
Notes:
Notice that the Royce map data header makes reference to a Royce .xsd file. (The link wasn't working when we checked)
ROYCE
<Substrate
Id="Substrate ID"
CarrierId="Carrier ID"
LotId="Lot ID"
ProductId="Product ID"
RootLayoutId="S1"
>
GENERIC E142
<Substrates>
<Substrate
SubstrateType="Wafer"
SubstrateId="5ABCC595TRV1"
>
<LotId>A815744B</LotId>
<GoodDevices>651</GoodDevices>
</Substrate>
</Substrates>
ROYCE
<Design
Locked="true"
Shape="Round"
SizeX_um="152400"
SizeY_um="152400"
ReticleSizeX_um="483"
ReticleSizeY_um="483"
OffsetX_um="0"
OffsetY_um="0"
>
<TemplateLayouts />
<Overlays />
</Design>
GENERIC E142
We did not see a design section in the E142 files that we examined.
Here we begin to see a very different approach from the standard E142 by Royce.
ROYCE
<Layouts>
<Layout Id="S1" CellCountX="317" CellCountY="317">
<CellSizesX_um>483 483 483 483 483 483 483 483 483 ... </CellSizesX_um>
<CellSizesY_um>483 483 483 483 483 483 483 483 483 483 ... </CellSizesY_um>
GENERIC E142
<Layouts>
<Layout LayoutId="WaferMap" DefaultUnits="um" TopLevel="true">
<Dimension X="1" Y="1" />
<DeviceSize X="300000" Y="300000"/>
<ChildLayouts>
<ChildLayout LayoutId="F6000" />
</ChildLayouts>
</Layout>
<Layout LayoutId="F6000" DefaultUnits="um">
<Dimension X="81" Y="84" />
<DeviceSize X="2438.000000" Y="2348.000000" />
</Layout>
</Layouts>
Notes:
1. The Royce XML specifically lists out the X and Y counts for each and every cell. The Generic E142 provides a row and column count.
2. The Royce XML specifically enumerates the cell size for each and every cell. The Generic E142 specifies a device size once for the child layout.
It's not clear that the method Royce uses in the Layout section is outside the possible definition of the SEMI-E142 specification but it is very unusual and unique and not something we have seen in the lsat 5 years handling SEMI E142 wafer files.