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GDSII Output

A wafer map file can be used as a template to create a GDSII file. This can be useful for those who need to design wafer level masks as it takes care of defining the positions of each die on the wafer.

However there is no actual pattern information in a wafer map so to create the complete wafer mask it may be necessary to "replace" the device representation (a simple rectangular boundary) with the actual pattern data from another cell. This can be done using a program such as Artwork's GDSFILT.

Consider a SINF file such as the one below:

DEVICE:TEST_CASE
LOT:WA00000-01
WAFER:W343080
FNLOC:180
ROWCT:9
COLCT:18
BCEQU:01          
REFPX:
REFPY:
DUTMS:mm
DIECT:126
XDIES:10
YDIES:20
RowData:__ __ __ __ __ 01 01 01 01 01 01 01 01 __ __ __ __ __
RowData:__ __ __ 01 01 01 01 01 01 01 01 01 01 01 01 __ __ __
RowData:__ 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 __
RowData:01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01
RowData:01 01 01 01 01 01 01 01 01 01 01 01 01 0B 01 01 01 01
RowData:01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01
RowData:__ 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 __
RowData:__ __ __ 01 01 01 01 01 01 01 01 01 01 01 01 __ __ __
RowData:__ __ __ __ __ 01 01 01 01 01 01 01 01 __ __ __ __ __

The parameters XDIES and YDIES define the pitch along X and Y axis. This value can be taken as the device size. Then using the RowData positions one can construct a representation of the devices on the wafer.

Missing Data?

Note that there is no wafer diameter information; however this value is generally known and can be input manually. Nor is their any information about the actual die size - the pitch includes both the die size plus any street width separating the die.

Finally, there is no information about exactly how this "array" of devices is positioned on the wafer. While this doesn't matter for applications like probing (since coordinates are relative to one or more reference devices) to create a wafer mask it is important to know how the map data is shifted from the wafer center.

Therefore WMapConvert assumes that the center of the map data array coincides with the center of the wafer (0,0)







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