Layout File Organization

The output data produced by RMapGen is organized both hierarchically and by layer. This makes it easier to select out the data you need and ignore or delete the data you don't need.

GDSII

               RETICLE_SHOT_MAP
                       |
          +------------+-----------+
          |                        |
      CROSSHAIRS                MATRIX
                                   |
                        +----------+--------+
                        |                   |
                       Cell               Reticle

The top cell is always named RETICLE_SHOT_MAP. The wafer outline and wafer margin boundaries are contained inside this cell. This cell references two additional cells:

CROSSHAIRS - which contains the 4 paths making up the cross hairs. It is always placed at 0,0.

MATRIX - which contains references to the cell and reticle placements. The matrix offset determines the coordinates of the insertion of the matrix cell.

Each die is represented by a structure called Cell which contains a single boundary defining the outline of the die.

Each reticle is represented by a structure called Reticle which contains a single boundary defining the outline of the reticle image on the wafer.

Layers

The following GDSII layers are created:

0 - contains the boundaries for the wafer outline and wafer margin

1 - contains the 4 paths for the cross hairs.

2 - contains the reticle outline boundary

3 - contains the die outline boundary

AutoCAD DXF